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UV-LED EXPOSURE : UV‑KUB 1
COLD UV-LED CURING SYSTEM
The UV-LED exposure system UV-KUB 1 benefits from a cold UV source based on UV-LEDs, for which the source is formed by UV-LEDs emiting at 365nm in standard configuration. Emiting sources at 385nm, 395nm or 405 nm are also available on demand. The monochromatic illumination, powered at 35mW/cm², is +/- 10% homogeneous over a whole 4 inches diameter working surface.
With the UV-KUB 1 you benefit from the LED technology that generates a cold UV light source, therefore eliminating undesirable thermal effects and forming a perfectly monochromatic illumination.
With its hemertic configuration, the UV-KUB 1 is an ideal exposure equipment for your laboratory or clean-room. Compact and controlled by touchscreen, the UV-KUB 1 ensures safety through an entirely closed exposure chamber, with both continuous and flashing modes available.
The lifetime of LEDs (>10000h) that form the UV light source makes it highly reliable and robust, with no particular maintenance needed.
UV-KUB : LED generation
Unrivalled collimation performance
Kloé company has paid particular attention to the unique and specific optical processing chain based on its broad experience in this field.
The collimated system of the UV LEDs that equips the UV-KUB 2 enables to benefit from an homogeneous exposure better than 5% of variation over the 4 inches working surface.
The angle of divergence of the UV light source is less than 2°. Therefore the fabrication of patterns with less than 2µm of resolution and with excellent verticality of edges on thick layers is guaranteed.
- Wavelength: 365nm or 405nm
- Power density: 40mW/cm²
- Substrate warm-up during exposure: < 1° C
- Exposure cycle : between 1s and 18h
- Number of programmable cycles : 10
- Dimensions : 260 x 260 x 260mm3
- Weight: 8,2 kg
- Colour touchscreen: 5, 7 inches
- Power supply: 110V/230V - 50Hz/60Hz