UV KUB 3 - UV-LED MASK ALIGNER SYSTEM

You are here

MASK ALIGNER : UV‑KUB 3

First compact system with UV-LED

The mask aligner UV-KUB 3 is the first mask alignement system equipped with a UV-LED source on the international market.

UV KUB 3 - UV-LED MASK ALIGNER SYSTEM

A NEW APPROACH OF MASK ALIGNMENT

The UV-KUB 3 is a laboratory equipment particularly suited for the production of microfluidic systems, microelectronics and optical ntegrated circuits through photolithography. Its design makes possible the realization of microstructures below 2 µm over the entire 4" work surface with an alignment precision of less than 3 µm.

Boasting the latest advances in UV-LED exposure technology from the UV-KUB 2, the illumination source of the UV-KUB 3 is devoid of undesirable thermal effects and is perfectly monochromatic. The lifetime of the LEDs (> 10000h) which form the UV source makes it a reliable equipment and requires no specific maintenance.

Beyond its size reduced to a minimum, its internal supporting structure dispenses the need for anti-vibration table, combined with low power consumption, the UV-KUB 3 is the ideal tool to control the operating costs.

Fully secure thanks to its dust-proof hood, this equipment is the only solution on the market that democratizes precision photolithography without requiring a cleanroom type environment.

 

 

UV-KUB : LED GENERATION

UV KUB 3 - UV-LED MASK ALIGNER SYSTEM

User-friendly and efficient

With the UV-KUB 3 make precision mask alignments of less than 3 µm in few minutes with the ergonomic control joypad or with the help of the dynamic and intuitive tactile interface.

 

 

UV KUB 3 - UV-LED MASK ALIGNER SYSTEM
Performances: 
  • Resolution: 2µm
  • Accepted masks size: Ø 5" (Ø 2" in option)
  • Accepted substrate size: Ø 2" - Ø 4" and 50x50mm - 100x100mm
  • Visualization system resolution: 3µm (1,5 µm in option)
  • Mask/substrate measuring distance resolution: 0,5 µm
  • θ substrate displacement resolution: 5.10-4°
  • XYZ substrate displacement resolution: 0,4 µm (0,2 µm in option)
  • Wavelength: 365nm or 405nm
  • Power density: 35mW/cm²
  • Substrate warm-up during exposure: < 1° C
  • Exposure cycle: between 1s and 18h
  • Number of programmable cycles: > 100
Specifications: 
  • Dimensions: 475  x 475  x 478 mm
  • Weight: 55 kg
  • Displacement control: USB or wireless 24 key PAD
  • Colour touchscreen: 15.6 inches
  • Power supply: 110V/230V - 50Hz/60Hz
  • Consumption: 180W