UV KUB 6 - UV-LED EXPOSURE-MASKING SYSTEM

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Exposure‑masking system 6 inches : UV‑KUB 6

UV-LED exposure-masking system

The exposure and masking system 6 inches UV-KUB 6 has been engineered after the success of the UV-KUB 2 among researchers worldwide to introduce an extended version. The UV-KUB 6 is a compact exposure-masking system equipped with an LED based optical headcollimated and homogeneous.

A new approach of masking

With the UV-KUB 6 you benefit from numerous adavantages of LED technology, including a cold UV source eliminating undesirable thermal effects and perfectly monochromatic illumination, as well as the possibility to operate by continuous or pulsed UV exposure. The UV-LED source of the UV-KUB 6 makes it a reliable equipment with no specific maintenance required and a lifetime of more than 10 000 hours of use.

From its hermetically sealed exposure chamber, the UV-KUB 6 makes UV photolithography more accessible by enabling its users to free themselves from operating in a clean-room and with complete safety. Compact and controlled by touchscreen, the UV-KUB 6 enables to achieve microstructures with available hard and soft contact masking modes.

UV-KUB 6 is a laboratory equipment especially well suited for the making of microfluidic systemsintegrated optical circuits and surface microstructuration by photolithography.

 

 

UV-KUB : LED generation

UV KUB 6 - UV-LED EXPOSURE-MASKING SYSTEM

Unrivalled collimation performance

Kloé company has paid particular attention to the unique and specific optical processing chain based on its broad experience in this field.

The collimated system of the UV LEDs that equips the UV-KUB 6 enables to benefit from an homogeneous exposure better than 5% of variation over the 6 inches working surface.

The angle of divergence of the UV light source is less than 2°. Therefore the achievement of patterns with less than 2µm of resolution and with excellent verticality of edges on thick layers is guaranteed.

UV KUB 6 - UV-LED EXPOSURE-MASKING SYSTEM
Performances: 
  • Resolution :  2µm
  • Wavelength : 365nm
  • Power density​ : 40mW/cm²
  • Substrate warm-up during exposure : < 1° C
  • Exposure cycle : entre 1s and 18h
  • Number of programmable cycles  : 10
Specifications: 
  • Dimensions : 260  x 260 x 260 mm
  • Weight​ : 15.5 kg
  • Colour touchscreen :  5, 7 pouces
  • Power supply : 110V/230V - 50Hz/60hz
  • Consumption : 200W