Kloe is present at Semicon Europa 2021, in Munich

Kloe’s booth at Semicon Europa 2021

Come see us at our booth B1354 and discover our new generation of mask aligner UV-KUB 3, 6 inches version.

Perfectly well suited for semiconductor manufacturing processes, the UV-KUB 3, 6 inches version offers many advantages:

  • a resolution better than 1µm
  • an alignment accuracy better than 1µm
  • an interface totally controlled by a joypad
  • a embedded PC which allows an automatic prealignment
  • an unrivalled collimated UV-LED light source, offering a divergence angle lower than 2°.

Visit the page dedicated to this soft lithography equipment or contact-us if you need more information.